ARM2™ BSE Detector

ARM2™ BSE detector

The Deben Solid state Gen5™ SEM detector is modular, with the motorised ARM2™ mechanical interface at the heart of the system. Also included are Gen5™ electronics and software GUI, as well as various diode options available for both STEM and BSE imaging. ARM2™ can be adapted to most conventional SEMs having a free chamber port at 90° to the beam axis. Control of diode segments and brightness/contrast is from within the software GUI, with up to three simultaneous video channels available (optional).

Deben Gen5 amplifier system has four BSE input channels and a choice of one or three simultaneous video output channels.
Unlike standard OEM back scattered detectors our BSE system provides an unrivalled level of adjustment permitting highly optimised images to be acquired. Matched to the latest developments in our low kV silicon detector technology, diodes are mounted on a retractable arm or in some cases directly to the objective lens.

The motorised arm provides three positions; inserted, park (semi-retracted), as well as fully retracted. Alignment of the detector position is normally better than 20µm. Control is via software or keypad, motorisation is particularly useful when the detector is mounted in an inconvenient position such as to the rear of the column, or when used in a hazardous environment such as a ”hot cell”.